6/15/2011	4:18:46 PM	Program started after a nonstandard shutdown
6/15/2011	4:18:47 PM	Helium valve closed
6/15/2011	4:18:47 PM	H2 valve closed
6/15/2011	4:18:47 PM	BCl3 valve closed
6/15/2011	4:18:47 PM	PH3 valve closed
6/15/2011	4:18:47 PM	SiCl4 pre valve closed
6/15/2011	4:18:47 PM	SiCl4 post valve closed
6/15/2011	4:18:47 PM	Main Vac valve closed
6/15/2011	4:18:47 PM	Bypass valve closed
6/15/2011	4:18:47 PM	Bubbler valve closed
6/15/2011	4:18:47 PM	Helium MFC set to  0.000000
6/15/2011	4:18:47 PM	H2 MFC set to  0.000000
6/15/2011	4:18:47 PM	BCl3 MFC set to  0.000000
6/15/2011	4:18:47 PM	PHl3 MFC set to  0.000000
6/15/2011	4:18:47 PM	SiCl4 MFC set to  0.000000
6/15/2011	4:18:47 PM	Bypass solenoid MFC set to  760.000000
6/15/2011	4:18:47 PM	Tube furnace set to 0
6/15/2011	4:18:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/15/2011	4:18:54 PM	Recipe started at 4:18 PM
6/15/2011	4:18:54 PM	Helium valve closed
6/15/2011	4:18:54 PM	H2 valve closed
6/15/2011	4:18:54 PM	BCl3 valve closed
6/15/2011	4:18:54 PM	PH3 valve closed
6/15/2011	4:18:54 PM	SiCl4 pre valve closed
6/15/2011	4:18:54 PM	SiCl4 post valve closed
6/15/2011	4:18:54 PM	Main Vac valve closed
6/15/2011	4:18:54 PM	Bubbler valve closed
6/15/2011	4:18:54 PM	Bypass valve opened
6/15/2011	4:18:54 PM	Helium MFC set to  0.000000
6/15/2011	4:18:54 PM	H2 MFC set to  0.000000
6/15/2011	4:18:54 PM	BCl3 MFC set to  0.000000
6/15/2011	4:18:54 PM	PHl3 MFC set to  0.000000
6/15/2011	4:18:54 PM	SiCl4 MFC set to  0.000000
6/15/2011	4:18:54 PM	Bypass solenoid MFC set to  0.000000
6/15/2011	4:18:54 PM	Tube furnace set to 0
6/15/2011	4:18:54 PM	Helium valve closed
6/15/2011	4:18:54 PM	H2 valve closed
6/15/2011	4:18:54 PM	BCl3 valve closed
6/15/2011	4:18:54 PM	PH3 valve closed
6/15/2011	4:18:54 PM	SiCl4 pre valve closed
6/15/2011	4:18:54 PM	SiCl4 post valve closed
6/15/2011	4:18:54 PM	Bubbler valve closed
6/15/2011	4:18:54 PM	Main Vac valve opened
6/15/2011	4:18:54 PM	Bypass valve opened
6/15/2011	4:18:54 PM	Helium MFC set to  0.000000
6/15/2011	4:18:54 PM	H2 MFC set to  0.000000
6/15/2011	4:18:54 PM	BCl3 MFC set to  0.000000
6/15/2011	4:18:54 PM	PHl3 MFC set to  0.000000
6/15/2011	4:18:54 PM	SiCl4 MFC set to  0.000000
6/15/2011	4:18:54 PM	Bypass solenoid MFC set to  0.000000
6/15/2011	4:18:54 PM	Tube furnace set to 0
6/15/2011	4:18:54 PM	Run finished at 4:18 PM
6/15/2011	4:18:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
